摘要
用射频磁控溅射法及一个由纯Ni和纯Al复合的特制靶材制备NiAl涂层 ,该涂层厚约10 μm ,硬度和弹性模量分别为 11.5 2GPa和 143.4 2GPa。研究表明 ,涂层的高硬度、低的表面粗糙度。
NiAl intermetallic coating were fabricated using an RF magnetron sputtering system and a specially designed composite target made from pure Ni and Al metals. The coating was about 10μm thick. The hardness and elastic modulus of the coating were 11.52GPa and 143.42GPa. The experiments show that the coating has excellent wear resistance. The high hardness, low roughness of surface, excellent oxidation resistance and good bonding between coatings and substrate may be cited reasons for its better wear resistance.
出处
《机械工程材料》
CAS
CSCD
北大核心
2001年第12期29-31,共3页
Materials For Mechanical Engineering
