微制造平台的精密隔振系统研究

Research on Precision Isolation System of Micro Manufacturing Platform

提出了微制造平台的精密隔振系统的设计思路和系统结构 ,通过对具有良好隔振性能的啄木鸟头部独特生物构造和隔振机理的研究 ,利用仿生学原理建立了微制造平台的精密隔振系统的整体结构模型 ,采用主动隔振和被动隔振相结合技术。为了消除线圈发热引起的热变形因素的影响 ,专门设计了超磁致伸缩致动器的恒温冷却系统。针对微制造平台所处激励环境的复杂性和系统内部存在的非线性 ,采用了带有两个修正因子二维模糊振动主动控制系统。最终 ,建立一套可实现微制造的精密隔振系统。

In this paper, a structure model of the precision isolation system of micro manufacturing platform is presented. The isolation mechanics and organic texture of a woodpecker brain which has good isolation characteristics are studied, and then the structure model of the isolation system of the micro manufacturing platform is established based on bionics mechanics. In order to reduce thermal distortion caused by temperature rise of coil, a constant temperature cooling system is designed for giant magnetostrictive actuator. Considering complex vibration environment and self-nonlinearity of the micro manufacturing platform, the authors have designed a two dimensional fuzzy control system with two regulation factors. Finally,a set of precision isolation system is established which can be used effectively in micro manufacturing.