摘要
在纳米科学与技术领域 ,纳米定位技术是实现纳米加工与测量的关键技术。本文作者采用柔性铰链为弹性导轨、压电陶瓷为微位移驱动器 ,设计了一种新颖的三维纳米定位机构 ,给出了其刚度公式和动力学模型 ,对压电陶瓷的压电误差及其补偿方法进行了分析 ,结合激光干涉仪微位移检测装置 ,设计并研制了数字闭环控制的三维纳米定位系统。实验表明 ,该纳米定位系统定位精度优于± 0 .0 3μm,定位分辨力 3nm,最大定位时间 4 0
In nanotechnology,nanopositioning technique is one of the key techniques for the nanoprocessing and nanomeasurement.A novel 3D nanopositioning mechanism on the basis of flexure hinge and piezoelectric ceramic actuator is designed in this paper,and its formula of rigidity and kinetic model are given.The piezoelectric error of piezoelectric ceramic and its compensation methods are analyzed,and furthermore the digital closed loop control system combined with laser interferometer and computer control system have been designed and developed.The experiment shows that the positioning accuracy of 3D nanopositioning system is better than ±0.03 μm within 10 μm×10 μm×10 μm range,with a positioning resolution of 3 nm and the maximum positioning time of 40 ms.
出处
《压电与声光》
CSCD
北大核心
2001年第6期439-442,共4页
Piezoelectrics & Acoustooptics
关键词
压电陶瓷
纳米定位系统
压电驱动
piezoelectric ceramic
piezoelectric error
nanopositioning system
digital closed loop control
