摘要
评论了国内外化学气相沉积的异质外延金刚石膜制备技术、性质表征以及应用和展望。
The major aspects of the recent development in the growth, characterization and applications of the hetero epitaxial diamond films by chemical vapor deposition were reviewed.
出处
《真空电子技术》
2001年第5期29-33,共5页
Vacuum Electronics
基金
国家自然科学基金资助项目 (1990 40 16)
关键词
异质外延
金刚石膜
化学气相沉积
Hetero epitaxial
Diamond films
Growth and characterization
Chemical vapor deposition
