激光衍射技术在石墨卷材厚度自动测量中的应用

Application of laser diffraction technology in automatical measuring the thickness of graphite roll

文中将激光衍射技术的测量推广到一个新的应用领域 ,即对宽度达 1.5m的柔性石墨卷材进行测量。高质量的宽幅石墨卷材应用前景很广 ,但其生产过程要求必须有配套的实时、无损伤的测量监测系统。文中以小功率的激光器作为光源 ,提出了一套可以对其厚度和均匀性进行在线测量的方案———以相对比较测量法测厚度 ,以多点测量测均匀性。文中讨论了测量系统一些重要相关参数的选取 ;对测量装置给出了一些从实践中总结的改良措施 ;还对衍射条纹的信号处理进行研究。

In this article the laser diffraction technology i s extended to a new application field to measure the thickness of 1.5-meter-wide soft graphite roll. The broad graphite roll in high quality has wide applicatio n, but its production process must have corresponding real-time and nondestruct ive measuring and observation system. Using low-power laser as illuminant, a se t of applicable metrology scheme that could measure both the thickness and the u niformity of graphite roll is advanced -- relative method is used to measure the thickness and multi-point measurement method is used to measure the uniformity . Some discussion on the selection of the related important parameters are also given here, and some modified measures concluded from experiments are proposed. What's more, the real-time processing on diffraction stripe is studied.