27keVAr^+离子轰击Fe-W合金的溅射原子角分布研究

The angular distributions of sputtered atoms for Fe-W alloy with 27 keV Ar^+ ion bombardment

本文报道在27keV Ar^+离子轰击Fe-W(30wt.％)合金情况下,溅射Fe和W原子的角分布实验结果。用卢瑟福背散射(RBS)谱仪分析了不同发射角θ处溅射沉积在衬底上的Fe-W薄膜的成分。结果表明,角分布形状均为over-cosine型,且W原子对Fe原子的比值与发射角θ有关。与我们以前关于Cu-Au合金和Ti-Ni合金的结果比较,暗示择优溅射程度可能与合金成分的质量比值有关。简单的模型分析发现,靶表面形貌是引起溅射原子角分布变化的重要因素。

Angular distributions of sputtered Fe and W atoms from Fe-W alloy(25 under 27 keV Ar ion bombardment have been measured by Rutherford backscattering and a collector, on which the sputtered atoms with different ejection angle 0 from the alloy surface deposit. The results indicate that angular distributions of both Fe atoms and W atoms are over-cosine shape and that the sputtered composition ratio Nw/NFe is linked with the ejection angle 0. Comparing this work with our previous work on Cu-Au and Ti-Ni alloy systems implies that the mechanism of the preferential sputtering seems to associate with the mass ratio of components. A simple model has been used and it is found that the target surface topography may be an important factor to cause the variation of angular distribution of sputtered atoms.