摘要
提出一种用于复杂内轮廓表面检测的新型单模光纤传感器 ,建立了镜面反射条件下的数学模型。根据轮辐式设计的二维光纤阵列探头结构 ,不仅可以得到被测点处的高度信息 ,还可同时得到倾斜信息 ,有效地解决了高度测量时表面倾斜给测量带来的影响。能对光源波动、表面反射率变化等引起的测量信号不稳定问题起到一定的补偿作用。为了提高采样效率 ,提出了一种曲线外插估计法 ,给出下一个测量点的位置。
A novel single-mode fiber-optic sensor was proposed for complex internal surface measurement. A mathematical model was established based on the specular reflection. According to the spoke-like two-dimensional fiber array in the sensor probe, the slopping information as well as height information can be obtained, which can compensate the coordinate measurement errors caused by the surface inclination. In addition, the impacts due to the light fluctuation and variation of surface reflectivity were also effectively relieved. To improve the sampling efficiency, an extrapolation method was presented to estimate the coordinate position of next measuring point. The experimental results verified the feasibility of the proposed method and the developed system.
出处
《光学技术》
EI
CAS
CSCD
2002年第1期38-40,共3页
Optical Technique