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石英玻璃的MeV离子注入效应(英文)

MeV ION-IMPLANTATION EFFECTS IN VITREOUSFUSED SILICA
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摘要 用电子顺磁共振和光吸收法研究了1—17MeV^(35)Cl和^(19)F离子注入石英玻璃产生的缺陷的特性,并与2MeV质子注入和0.633MeVγ射线辐照的结果作了比较。观察到MeV重离子轰击下石英表面发生分裂和密度变化现象。对于17MeV^(35)Cl^(+4)离子,注入通量约为1×10^(11)Clcm^(-2)下,体收缩率约为0.36 %。 The nature of defects in vitreous fused silica induced by implanting with 1-17 MeV 35C1 and 19F ions have been investigated and compared with the results obtained after 2 MeV protons or 0.633 MeV γ-rays irradiation using ESR and optical absorption techniques. The surface cracking caused by MeV heavy ion-bombardment was found. No cracks were seen for 2 MeV protons. The contraction in MeV heavy ion implanted vitreous fused silica was observed. The volume change is about 0.36% at an ion fluence (17MeV 35Cl+4) of 1×1015 35Cl cm-2.
出处 《核技术》 CAS CSCD 北大核心 1989年第10期587-593,共7页 Nuclear Techniques
基金 Supported in part by the American National Science Foundation [DMR86-15641]
关键词 石英玻璃 离子注入 辐射损伤 Ion-implantation effect Radiation damage Fused silica
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