亚微米超精密车床隔振的广义预测控制仿真研究

SIMULATION STUDY OF GENERALIZED PREDICTIVE CONTROL OF VIBRATION FOR THE SUB-MICRO ULTRA-PRECISION TURNING MACHINE

亚微米超精密车床振动控制系统是一个带不确定干扰的非线性系统，用广义预测控制原理提出了一种数字控制的新方法。该方法克服了一般线性状态反馈控制所存在的由于模型非线性和干扰引起系统动态特性和控制精度变差的缺点。用该方法所设计的电磁作动器能够有效地抑制空气弹簧固有的非线性和电磁线圈反电势所引起的涡流干扰。通过仿真，将该方法与一般线性状态反馈控制相比较，结果证明了该方法使系统具有更强的鲁棒性、更好的动态品质和更高的控制精度。

With the generalized predictive control principle，a new digital control method of vibration is presented for the sub-micro ultra-precision turning machine，which is a nonlinear control system with uncertain disturbances. The method has an advantage comparing with the linear state feedback control method, with which the dynamic performances and control accuracy of the system may become worse while the nonlinearity and disturbances exist. The electromagnetic actuators designed with the new control law can effectively restrain the nonlinearity of the air springs and the vortex disturbance caused by the anti-electromotive force of the electromagnetic winding. The simulation results testify that the new vibration control method has stronger robustness, better dynamic performances and higher control accuracy than the common linear state feedback control method.