宽带增透膜反射光谱的理论与实测偏差的修正

CORRECTION OF DEVIATION BETWEEN THEORY AND EXPERIMENT FOR REFLECTION SPECTRUM OF BROAD-BAND ANTI-REFLECTION COATING

探讨用折射率补偿即改变厚度的方法 ,并辅助于计算机修正来矫正真空镀膜法生产宽带增透膜时实验值与理论值存在的偏差 ,取得了良好效果 。

By compensation of refractive index, changing the thickness, and using computer-aided design, a method was studied for correcting the deviation between theory and experiment in the reflection curve when a broad-band anti-reflective coating was produced with vacuum coating process. The method gets a good result and is used successfully in practical production.