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区熔再结晶制备多晶硅薄膜太阳电池 被引量：4

ZONE MELTING RECRYSTALLIZATION FOR POLYCRYSTALLINE SILICON THIN FILM SOLAR CELLS
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摘要 研究了区熔再结晶 (ZMR)设备及其工艺特点 .在覆盖SiO2 的重掺P型单晶硅衬底上用快速热化学气相沉积 (RTCVD)在其上沉积一层很薄的多晶硅薄膜 ,用区熔再结晶法对薄膜进行处理 ,得到了晶粒致密 ,且取向一致的多晶硅薄膜层 .以此薄膜层为籽晶层 ,再在上面以RTCVD制备电池活性层 ,经过标准的太阳电池工艺 ,得到了转换效率为 10 .2 1%,填充因子为 0 .6 913的电池产品 . ZMR (zone melting recrystallization) apparatus is introduced, and the processing characteristic of ZMR is studied. A very thin poly-crystalline silicon film is deposited by RTCVD on a heavily doped P-type mono-crystalline silicon substrate coated by SiO 2. After ZMR, a seed layer is obtained, in which the crystalline grain is compact and the orientation is uniform. Then the active layer of solar cell is deposited by RTCVD. After standard solar cell processing, the efficiency of finished cell is 10.21%, and fill factor is 0.691 3 under the conditions of AMO, 1.07 cm 2 and 25 ℃.
作者 李维刚 许颖 励旭东 姬成周
机构地区 北京师范大学低能核物理研究所 北京市太阳能研究所光电室
出处 《北京师范大学学报（自然科学版）》 CAS CSCD 北大核心 2001年第6期746-749,共4页 Journal of Beijing Normal University(Natural Science)
基金 国家科技部"九七三"基金资助项目
关键词 区熔再结晶 多晶硅薄膜 太阳电池 快速热化学气相沉积 制备工艺 转换效率 zone melting recrystallization poly-crystalline silicon film solar cell
分类号 TM914.42 [电气工程—电力电子与电力传动]
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  • 1[3]Kawama Y, Takami A, Naomoto H, et al. In-situ control in zone-melting recrystallization process for formation of high-quality thin film polycrystalline Si[C] //25th PVSC, 1996:481
  • 2[4]Walter Zimmermann,Sandra Bau, Fridolin Hass, et al. Silicon sheets from powder as low cost substrates for crystalline silicon thin film solar cells[C]//J Schmid. 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Italy, European Communities, 1998:1790
  • 3[1]Morikawa H, Kawama Y, Matsuno Y, et al. Development of high efficiency thin film Si solar cells using zone melting recrystallization[C]//Technical Digest of the International PVSEC-11, Japan, 1999:529
  • 4[2]Daniel J Aiken, David D Sminth, Allen M Barnett. A device structure for thin, light trapped epitaxial silicon silar cells[C]//25th PVSC, 1996:685

共引文献1

同被引文献55

  • 1Catchpole K R, McCann M J, Blakers A W, et al. A Review of Thin Film Silicon For Solar Cell Appications[ A]. 16th European Photovoltaic Solar Energy Conference [C] . 1-5 May 2000, Glasgow, UK.
  • 2Green Martin A, Emery Keith, King David L, et al.Solar Cell Efficiency Tables ( version 23 ) [ J ]. Progress in Photovoltaics: Research and Applications,2004 (12): 55-62.
  • 3Schultz O, Glunz S W, Goldschmidt J C, et al. Thermal Oxidation Processes for High -efficiency Multicrystalline Silicon Solar Cells [ A] . 19th European Photovoltaic Solar Energy Conference [ C ] , June 2004, Paris.
  • 4Poortmans J, Diet A, Raeuber A. Survey of the European Activities and Progress in the Field of CVD-Grown Crystalline Si Thin-Film for Solar Cells on Low-Cost Insulating Substrates [ A ] .16th European Photovoltaic Solar Energy Conference [ C ], May 2000,Glasgow, UK.
  • 5Faller Frank R. Epitaxial silicon thin film solar cells[ D ]. Albert - Ludwigs University, Ph. D Thesis.Freiburg, Germany. 1998.
  • 6Goetzberger [A]. Crystalline Thin Silicon Cells[A]. 26th PVSC [C] . Sept, 30-Oct, 3, 1997. Anaheim, CA
  • 7Rath J K. Low Temperature Polycrystalline Silicon: a Review on Deposition, Physical Properties and Solar Cell Applications [ J ] . Solar Energy Materials and Solar Cells, 2003, 76: 431-487.
  • 8Takuya Matsui, Masaharu Tsukiji, Hiroyuki Saika, et al. Influence of Substrate Texture on Microstructure and Photovoltaic Performance of Thin Film Polycrystalline Silicon Solar Cells [ J ] . Journal of Non- Crystalline Solids 2002, 299 -302: 1152-1156.
  • 9Kenji Yamamoto, Masashi Yoshimi, Takayuki Suzuki,et al. Below 5 m thin film poly-Si solar cell on glass substrate fabricated at low temperature [ A] . 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion [C], July, 1998. Vienna, Austria.
  • 10Bergmann R B, Hausner R M, Jensen N, et al. High Rate, Low Temperature Deposition of Crystalline Silicon Films for Thin Film Solar Cells on Glass [ A ]. 2ndWorld Conference and Exhibition on Photovoltaic Solar Energy Conversion [C], 6-10 July, 1998. Vienna, Austria.

引证文献4

二级引证文献28

北京师范大学学报（自然科学版）
2001年 第6期

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