1nm级表面粗糙度的双频激光测量系统

A New Profilometer with a Dual-frequency Laser for Measuring the Surface Roughness with 1?nm

研究了一种基于共外光路双频激光光外差原理的 1nm级表面粗糙度的测量系统 .从理论上论证了测量系统的原理和测量精度 ,并用实验结果证明了测量系统的分辨率 .此测量系统没有测量基准误差 ,对测量环境要求不特别苛刻 。

A new profilometer with a dual frequency laser for measuring the surface roughness with 1?nm is presented when its measuring range is -0.158～+0.158?μm, which is based on the principle of outside con beam and dual frequency laser DPC(differential phase contrast). The theoretical model for the profilometer and the uncertainty is analyzed. And test results are presented to prove the good measuring resolution of the profilometer. The profilometer has no datum error when measuring and is not required very good environment around it, so it can measure the profile of precision surfaces or super precision surface.