大面积a-Si∶H太阳电池背电极性能实验与分析

Experiment and analysis on the characteristics of back electrode for the a-Si∶H solar cell with large area

对大面积 ( 2 80 0cm2 )单结非晶硅太阳电池背电极制作工艺进行实验分析 ,得到 :蒸发铝膜时的真空压力小于 2×10 -3Pa时 ,电池输出平均相对提高 8.4% ;掩膜钢丝保持松紧度一致时 ,电池输出平均提高 6 .1% ;热老化处理可使电池性能下降 ,最差时可达 -2 6 .3 %。因此保持蒸发时的真空度小于 2× 10 -3Pa、保持掩膜钢丝有一致的松紧度以及去掉热老化工艺 ,是提高a Si∶H太阳电池背电极制作质量的关键。这一结论对指导大面积非晶硅太阳电池的工业化生产具有实际意义。

The experimental analysis of the manufacturing technology of back electrode for the single junction a Si∶H solar cell with large area (2 800 cm 2) was performed. The results show that when the vacuum pressure for evaporating the Al film is less than 2×10 -3 Pa,the relative value, the average increase of the cell output is 8.4% Moreover, when the degree of tightness of the wire for the evaporation mask is homogeneous, the average improvement of the cell output is 6.1%. However, the cell performance is decreased by the heat treatment, even as high as -26.3%. Therefore, the key points for improving the manufacturing quality of the back electrode for the a Si∶H solar cell is ensuring the vacuum degree for evaporation to be less than 2×10 -3 Pa, keeping the degree of tightness of the wire for the evaporation mask homogeneous and eliminating the heat treatment process. The conclusion has a practical significance for the industrial manufacture of the a Si∶H solar cell with large area.