摘要
利用MOSFET的压阻效应 ,本文提出了力敏运算放大器的概念、基本原理和设计思想 .作为其应用之一 ,研制出一种新型集成压力传感器———集成MOS力敏运放压力传感器 .这种压力传感器具有很高的压力响应灵敏度 。
The concept, fundamental and design methodology of stress-sensitive operational amplifier are proposed on the basis of piezoresistive effect of MOS field-effect transistor. As one of its applications, a novel integrated pressure sensor with stress-sensitive MOS operational amplifier is designed and fabricated. This kind of pressure sensor is of very high pressure sensitivity and promising to achieve widespread application in many fields.
出处
《电子学报》
EI
CAS
CSCD
北大核心
2001年第8期1032-1034,共3页
Acta Electronica Sinica