摘要
讨论了电路在直流和脉冲直流工作情况下互连线的寿命 ,并重点考虑了工艺缺陷软故障的影响 ,提出了新的互连线寿命估计模型 .利用该模型可以估算出在考虑缺陷的影响时互连线的寿命变化情况 ,这对 IC电路设计有一定的指导作用 .
Taking process defects into account,the device lifetime under dc and pulse dc stresses are discussed.Based on the analysis,a new model of interconnect lifetime is presented to estimate the variation in the interconnect lifetime when considering the defects,which is helpful to the IC design.The simulation results prove the model valid.
基金
国家"九五"科技攻关 ( 96 -738)
国防科技预研基金( 99J8.3.3.DZ0 134)资助项目~~
