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液体粒子计数器测量原理及校准方法 被引量:1

Measurement principle and calibration of liquid-borne particle counter
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摘要 液体粒子计数器广泛的应用于高纯水,高纯化学溶液中对不溶性微粒子进行测量。本文介绍了两类液体粒子计数器(光障碍式液体粒子计数器和光散射式粒子计数器)的测量原理和校准方法。为用户正确选择和使用仪器提供依据。 Liquid-borne particle counters are used in a variety of pure water and chemicals to measure insoluble particles. This paper presents the measurement principles and calibration methods of two kinds of liquid-borne particle counters (light obscuration particle counter and light scattering particle counter) . It provides the basis for choosing and using liqud-borne particle counter
机构地区 天津大学
出处 《洁净与空调技术》 2001年第4期29-31,共3页 Contamination Control & Air-Conditioning Technology
关键词 液体粒子计数器 光散射式粒子计数器 测量 校正 Liquid -borne particle counter Light obscuration particle counter Light scattering particle counter Meaurement principle Calibration
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参考文献3

  • 1[1]Shigeru Arashiki Detection Principle and Performance of the Liquid-Borne Particle Counter RION TECHNICAL NOTE 616,Oct 1999.
  • 2[2]Light Scattering Automatic Particle Counter for Liquid JIS B 9925-1989.
  • 3[3]Standard Practice for Defining Size Calibration Resolution,and Counting Accuracy of Liquidbome Particle Counters Using Near Monodisperse Spherical Particulate Materials ASTM F65887 (1992) .

同被引文献6

  • 1GB/T11446.1-1997.电子级超纯水中国国家标准[S].,..
  • 2周德庆.微生物学教程[M].北京:高等教育出版社,2005.
  • 3Bryant R. Particle Monitoring in Ultra Pure Water for Microelectronic Applications[EB/OL]. (2007 - 11-23 ) [2009-10-19].http://www. pme asuring.com/wrap/filesApp/diWater/file_ 1/DIwater.pdf.
  • 4DohrenC F, Hufm D R. Absorption and scattering of Light by small particles[M]. New York :wiley, 1983.
  • 5Lee Gwo-Bin, Hung Chen-I, Ke Bin-Jo, et al. Hydrodynamic Focusing for a Micromachined Flow Cytometer[J]. ASME J Fluids Eng, 2001,123(9) :672-679.
  • 6谢永桂.提高半导体器件成品率的有效对策[J].半导体技术,1999,24(2):47-54. 被引量:6

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