利用共焦成像原理实现微米级的三维轮廓测量

Profile Measurement in Micro Order Precision by Confocal Image

以普通光学成像透镜取代显微物镜 ,以针孔阵列 (5 0 0× 5 0 0 )取代单针孔 ,实现了全场并行共焦测量 .在数据处理上 ,采用了内插值三维重构算法 ,以及二次曲面拟合的系统误差校正算法 ,可以在较大的采样间距下获取较高的测量精度 .实验表明 ,系统的最大横向测量范围为 5mm× 5mm ,横向测量精度约为 13μm ,纵向测量精度约为 5 μm ,因此可大大提高测量视场及测量速度 .

A whole field confocal measurement is achieved when a normal optical lens and 500×500 pinholes array panel are used instead of a microscope and a single pinhole. The measuring field is improved greatly, so it is with the measuring speed. The high vertical resolution is achieved at a larger sampling distance when interpolation algorithm is adopted to reconstruct the 3D profile and the conicoid fitting technique is used to calibrate for the system error in the data processing. Experiments show that the maximum lateral measuring field is 5 mm×5 mm, the lateral resolution is about 13 micrometers, and the vertical one is about 5 micrometers.