EACVD金刚石薄膜plane-view样品的观察

Study of Plane-view TEM Samples of Diamond Films

本工作利用透射电镜对电子束增强热丝化学汽相沉积金刚石薄膜的微观结构及生长方式进行了研究。观察表明:外强颜色不同的金刚石膜,其内部晶粒尺寸、缺陷类型和生长方式也不同。主要归纳为两类:一类是以五次孪生方式生长;另一类是以位错和微孪晶共存生长。

Microstructure and growth mode of diamond films by electron assisted CVD method have been studied by means of transmission electron microscopy. The results showed that grain size in diamond film, defect and the film growth mode are different to diamond films appearing different colour. There exists two typical microstructure in crystals of different diamond films,one is mainly five-fold twins, the other is mainly dislocation and micro twins coexisting.