金刚石薄膜热沉的制备研究

Fabrication of Heat Sinks Made of Vapor Growth Diamond Film

利用灯丝热解CVD方法合成了厚度为100μm以上的金刚石多晶薄膜。气相合成的金刚石膜按照2mm×2mm×0.1mm尺寸切割后,通过表面真空蒸镀Ti、Pt、Au包层,在一定的温度下通过烧结等方法使金刚石膜表面金属化,实现了金刚石膜热沉的制备。在GaAs/AlGaAs激光列阵二极管的散热中使用了金刚石膜热沉,结果表明该激光器的散热特性得到了初步的改善,激光器的最大光输出功率较铜热沉散热时提高了10％左右。

PolycrystaHine dimond films in thickness above 100μm were synthesized using thermal chemical vapor deposition method of tungsten filament Diamond heat sinks made of vapor growth diamond film were prepared by cutting the film into blocks with 2.0mm×2.0mm in area and 100μm in thickness, coated with the layers of Ti, Pt, Au and annealing at proper temperature. The output characteristics of GaAs/AlGaAs laser diode array, which was installed on the vapor growth diamond film heat sinks, was investigated. As a result, the maximum light output power of the laser diode array on dia mond heat sink was increased by 10% compared with that installed on conventional copper heat sink.