非晶碳氢膜的介电谱与分形结构

Dielectric spectra and fraction structure of amorphous carbin-hydrogen film

利用 RF- DC辉光放电等离子化学气相沉积法制备了非晶碳氢膜 ,并测试了其介电谱 ,用分形理论研究了这种无序结构材料的介电谱与物质结构的关系。结果表明 ,低频反常色散介电谱确实可以传达物质结构的信息。

The amorphous carbin hydrogen film and a C 1 x Cl x :H film were produced by plasma chemical vapour deposition with RF DC glow discharge. The dielectric spectra were measured. The relations between the dielectric spectra of the disorder structure material and their stucture were studied with fraction theory. The result indicated that the lower frequency anomalous dispersion can transfer the information of material structure.