砷化镓阈值电压自动测试系统的研制

Design of GaAs threshold voltage uni formity measurement system

介绍了砷化镓阈值电压的测试原理和测试方法,并完成了Φ3砷化镓阈值电压自动测试系统的设计与研制。该系统包括自动探针台、测量设备和相应的软件。自动探针台的定位精度为10μm,分辨率为2.4μm,速度为251mm/s。阈值电压测量精度为1mV。该系统可进行Φ3砷化镓圆片的MESFET器件参数的自动测量、存储和运算,能给出圆片的阈值电压分布图。该系统还可用于大圆片的电阻率、欧姆接触电阻、背栅电压和光敏特性等的测量。

The principle and the method of GaAs threshold voltage measurement was i ntroduced.AΦ3GaAs threshold voltage automatic me asurement system was designed.This system consists of automatic prober,measurement system and soft ware.The orientation precision of t he prober is 10μm,the resolving power is 2.4μm ,the speed is 251mm /s .The precisio n of Vth measurement is 1mV.This system can carry out automatic measurement of MESFETs ' parameters onΦ3GaAs wafer .It can save the data,map theΦ3GaAs threshold voltage.It can also measure the resistivity,backgate effect and so on.