化学气相沉积制膜技术的应用与发展

The Application and Development of Techniques of Film Making With Chemical Vapor Deposition

化学气相沉积作为一种有效的表面工程技术手段 ,发展十分迅速 ,应用范围日趋广泛。本文介绍了化学气相沉积制膜技术在国民经济各个领域中的应用及其发展趋势。

As an effective surface engineering technology,the chemical vapor deposition has developed rapidly,and its application is becoming more and more wildly.The article has introduced the application and development tendency of techniques of film making with chemical vapor deposition in all fields.