温度对离子注入Ti6Al4V表面改性影响

Influence of Temperature on Properties of Nitrogen Ion Implantation of Ti6Al4V Alloy

对Ti6Al4V 合金进行温度范围从100 ℃到600 ℃,注入剂量为:4×1017ions.cm-2氮离子等离子体源离子注入(N-PSII)。用俄歇电子能谱仪(AES)对注入样品进行元素深度分布剖面分析。用显微硬度及针盘磨损试验机测试表面改性的效果。利用X 射线衍射(XRD)分析表面改性层晶相的变化。用光学显微镜观察磨痕宽度。分析发现,当温度从 100 ℃升到600 ℃时,注入层厚度明显增加。其中,高温注入时获得较高的表面硬度和较好抗磨损性。XRD分析发现,随温度升高注入层表面形成TiN和Ti2N析出相。

Specimens of Ti6Al4V alloy were ion- implanted using a nitrogen plasma source N-PSII at temperature from 100℃ to 600℃ with dosage of 4×1017ions.cm-2. Auger Electron Spectroscopy (AES) was used to determine the nitrogen concentration profiles. Micro hardness measurement and pin-on-disk wear were performed to evaluate the improvements of the surface modification. X-ray Diffraction (XRD) was employed to determine the phases presented in the surface modified layer. The thickness of implanted layer increased by about an order of magnitude when the temperature was elevated from 100℃ to 600℃. Higher surface hardness and wear resistance were also obtained at higher temperature. With the increase of temperature, new phases (TiN, Ti2N) were performed in the surface modified layer.