钼圆片生产的工艺设计及质量控制

Process Design and Quality Control of Mo Wafers Production

在总结多年产品开发研究、设计经验的基础上 ,对钼圆片生产方式进行了综合分析比较 ,着重对钼板冲制。

Summary is made on the several years of product development and design experiences.Analysis and comparison is made of the Mo disk process with emphasis on overall discussion regarding the process design and quality control of Mo wafers production by Mo plate punching and machining.