摘要
对金刚石膜和氢化非晶碳膜的电阻率测试方法进行了对比研究 .即对金刚石膜采用“大”尺度电极 ,氢化非晶碳膜采用“大”尺度电极和小尺度电极测量I-V曲线进行对比分析和讨论 。
The measure method of resistansity of diamond film and a-C:H film are compared in this work. Large criterion electrode is applied to diamond film and both large and small criterion electrodes are applied to a-C:H film. The result of measurement of I-U curve is studied and discussed and significant outcome is derived.
出处
《首都师范大学学报（自然科学版）》
2001年第4期20-22,30,共4页
Journal of Capital Normal University：Natural Science Edition
基金
北京市自然科学基金资助项目 2 982 0 11
