MEMS器件的计算机辅助设计与模拟

COMPUTER-AIDED DESIGN AND SIMULATION FOR MEMS DEVICES

概要论述了微电子机械系统的计算机辅助设计和模拟过程 ,分析了MEMSCAD系统所应具有的主要内容和系统模拟中的关键问题 ,讨论了目前经常采用的各种模拟系统的模拟形式和应用范围。并结合静电微马达与微米 纳米镊子实例 ,分析了模块化的CAD软件结构形式以及所用MEMS材料的数据库建立和应用连接 ,所提出并采用的开发方式适用于微传感器及微执行器等微系统器件的设计与模拟。

The Computer-Aided Design (CAD) and simulation of micro-electro-mechanical systems is summarized and the primary contents and key problems with the MEMS simulation are alto discussed. Various simulating systems are classified according their construction and application range. Combined with the instances of electrostatic micromotor and micro/nano tweezers, the modularized structure of CAD system as well as the establishment and linking with CAD system of the material database of MEMS is analyzed. The presented approach can be extended to the design and simulation of microsensors and microactuators.