摘要
首次提出了一种新型二自由度的直线超声电机 ,阐述了该电机的基本结构和产生二自由度直线运动的驱动原理 ,利用有限元法设计了电机 ,并制造了样机 。
For the first time,a new type of linear ultrasonic motor with two degrees of freedom(D O F)is brought forth by authors This paper presents the motor′s structure and operational principle that can realize linear motion with two D O F ,and the motor′s vibration modes are analyzed by using the finite element method Lastly,a proto type linear motor is constructed Actuator′s vibration modes are tested with the frequency scanning and the laser speckle measurement equipment,experimental results prove that the theory and the design
出处
《压电与声光》
CSCD
北大核心
2001年第5期346-348,358,共4页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目 (5 0 0 0 5 0 10 )
关键词
超声电机
二自由度直线运动
工作原理
ulrtasonic motor
linear motion with two D O F
elliptical motion
