摘要
提出了一种用线阵CCD对物体三维轮廓进行测量的新方法。通过矩形光栅离焦投影 ,产生正弦光场 ,利用线阵CCD对物体进行扫描采样 ,采用三步相移技术进行相位解调 ,对物体三维轮廓进行测量。重点分析讨论了用线阵CCD对物体三维轮廓进行测量的原理和特性 。
A new 3 D surface profilometry is presented using linear CCD.The sinusoidal stripes are caused by a rectangular grating system with off focused projection.The grating pattern projected on an object surface moved by a precise shift platform is scanned and acquired by a linear CCD, and the gratings phase deformation caused by the surface shape is extracted by three step phase shift processing.The principle and the advantages of this technique are discussed in detail,and the schematic diagram of experimental setup and some results are given.
出处
《半导体光电》
CAS
CSCD
北大核心
2001年第6期451-451,共1页
Semiconductor Optoelectronics
基金
西安交通大学青年教师基金资助项目
