非致冷钛酸锶钡铁电薄膜红外探测器

Uncooled Infrared Detector Arrays Based on Barium Strontium Titanate Thin Films

采用半导体微机械 (Micro Electro MechanicalSystem ,MEMS)技术制备了具有热隔离微桥的 8× 8元非致冷Ba0 .8Sr0 .2 TiO3 薄膜红外探测器列阵原型器件。热释电性能优良的Ba0 .8Sr0 .2 TiO3 薄膜是使用浓度为 0 .0 5M的前躯体溶液、采用Sol Gel制备的。在 5～ 30℃的温度范围内 ,Ba0 .8Sr0 .2 TiO3 薄膜的热释电系数大于 2 0nC cm2 K ,在 16 .8℃处达到最大值 4 1.3nC cm2 K。在 19℃的环境温度下 ,使用 5 0 0K黑体作为红外辐射源 ,测得 10Hz调制频率下 ,探测单元的探测率D 为 5 .9× 10 7cmHz1 2 W-1。

elements uncooled infrared detector arrays based on Ba 0.8 Sr 0.2 TiO 3 thin films have been fabricated with a Micro Electro Mechanical Systems(MEMS) technique. High quality pyroelectric Ba 0.8 Sr 0.2 TiO 3 thin films were deposited by sol gel method with a 0.05 precursor solution. The measured pyroelectric coefficient of the films is larger than 20 nC/cm 2K at 16.8℃. An infrared detectivity D * of 5.9×10 7cmHz 1/2 W -1 has been obtained at 19℃ and 10 Hz in the detector arrays. The higher infrared detectivity D * can be expected by the improvement in the structure of pyroelectric element and the electrode materials.