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Fe-N软磁薄膜的结构和性能 被引量:1

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摘要 用RF溅射制备厚度为200nm的Fe-N薄膜在250℃,12000A/m磁场下真空热处理后,当N含量在5%~7%(原子百分数)范围内形成a′+a″相时,4πMs可达2.4T,Hc<80A/m,2~10MHz下高频相对导磁率μr=1500,可满足针对10Gb/in2存储密度的GMR/感应式复合读写磁头中写入磁头的需要.Fe-N系薄膜中a′相的形成机理和点阵常数与块状试样按Bain机理形成的a′相有明显的差别,得到了薄膜中a′相的a,c与C_N^a′之间的线性关系式.
出处 《中国科学(A辑)》 CSCD 北大核心 2002年第2期132-140,共9页 Science in China(Series A)
基金 国家自然科学基金资助项目(批准号:19392300 19890310)
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