位相板衍射准直研究

Study of Phase Plate Alignment in Large-scale Measurement

本文介绍了在大尺寸测量情况下 ,利用半导体激光光纤和位相板衍射技术进行准直的原理和方法 ,理论上分析了高斯光束通过位相板后衍射光场的特点 ,提出并分析了影响该原理精度的因素 ,从理论上分析并用计算机仿真验证了该原理在大尺寸形位误差测量中的可行性。

This paper describes the measuring principle and method of large-scale measurement with laser diode fiber and phase plate alignment technique. The characteristics of the pattern distribution of a Gaussian beam diffracted by a π-step phase plate were analyzed theoretically. The influences from them on the measurement accuracy were discussed. The feasibility of using phase plate alignment technique for large scale form and position errors measurement was demonstrated theoretically and calculated using a computer numerically.