摘要
介绍了气体微流量标准装置对漏率的校准方法。在温度 16～ 5 0℃范围内 ,对两支薄膜渗氦型漏孔进行了校准 ,并给出了温度与漏率的关系表达式。得出了研究结论。
The calibration method of leakage rate with the gas low range standard apparatus is introduced.Two helium permeating leaks have been calibrated in the range of temperature from 16℃ to 50℃ and the relation expressions between temperature and leakage rate are presented.
出处
《真空与低温》
2001年第4期200-203,共4页
Vacuum and Cryogenics
