溅射输运理论中的经典散射截面

Classical scattering cross section in sputtering transport theory

利用溅射理论中常用的Lindhard标度相互作用势碰撞散射分析了Sigmund单幂散射截面与双幂散射截面之间的区别。计算表明 ,对于Born -Mayer相互作用势碰撞散射 ,双幂截面可以给出比单幂截面好得多的描述。特别对于UrbassekKr-C相互作用势 ,只有利用双幂截面求解输运方程才能计算出反冲密度函数比较好的近似值。

For Lindhard scaling interaction potential scattering commonly used in sputtering theory, we analyzed the great difference between Sigmund's single power and the double power cross sections calculated in this article. The double power cross sections can give a much better approximation to the Born-Mayer scattering in the low energy region (m^0.1). In particular, to solve the transport equations by K r-C potential interaction given by Urbassek few years ago, only the double power cross sections (m^0.1) can yield better approximate results for the number of recoils. Therefore, the Sigmund's single power cross section might be replaced by the double power cross sections in low energy collision cascade theory.