阴极真空弧源磁过滤弯管偏压模式研究

Effect of bias mode on transport of vacuum arc plasma through curved magnetic filters

为了改进阴极真空弧等离子体通过磁过滤弯管的传输效率 ,测定了磁过滤弯管出口离子电流与阴极弧流的关系。结果表明 :磁过滤弯管内表面中 ,靠近大径中心一侧的表面 (内侧面 )和远离大径中心一侧的表面 (外侧面 )与等离子体的相互作用是独立的。存在两种向磁过滤弯管内表面运动的离子流 :离子碰撞导致的横向扩散离子流和从阴极弧出来的较高能量的惯性离子流。两种离子流通过磁过滤管的传输过程有不同的机制。整个磁过滤弯管偏压较仅仅Bilek板偏压有更高的离子传输效率 ,Bilek板偏压对磁过滤弯管离子传输起主要作用。

A special curved magnetic filter was developed to investigate the effect of different bias mode on the transport of cathode arc plasma through the curved magnetic filter. The relation between the ion output of the filter and the cathode arc current was determined. Each part of the wall inside the duct interacted with the plasma independently. Two kinds of ion flux onto the duct wall were presented and they played different roles when cathode arc current changed. It was found that whole duct bias was more effective in plasma transport through the filter than the Bilek plate bias, although the Bilek plate (or the outer-wall inside the duct) contributed most part of ion output of curved magnetic filter when they were positively biased.