离子镀多元膜抗高温氧化性能的研究

Study of High Temperature Oxidation Behavior of (TiFeCr)N

研究了多弧离子镀 (TiFeCr)N多元膜的抗高温氧化性能 ,结果表明 :这种多元膜加热至 60 0℃时膜层仍保持良好的光泽 ,加热至 80 0℃膜层仍保持完整 ,没有类似TiN膜的局部脱落现象 ,在 80 0℃以下的氧化增重均低于TiN膜 ,在60 0℃还能有效地抑制铜基体的氧化 。

The high temperature oxidation behavior of (TiFeCr)N multi component co atings by ion plating were investigated. The mass gain of the multi-component coatings during the all experimental temperature region were lower than that of TiN coating.No change in the gloss of the coatings occurred after treatment of 600 ℃×1 h, and there was no local spallation being similar to TiN coatings after treatment of 800 ℃×1 h. There was no oxide in the sample with the multi component coatings after treatment of 600 ℃×1 h,while there was some copper oxide in the sample with TiN coatings,which showed that the multi component coatings can protect the substrate from oxidation.