非均匀电场中电子在H_2/CH_4混合气体中运动的数值模拟

Numerical Simulation of Electron Motion in the Mixture of H_2/CH_4 in a Non-uniform Field

用MonteCarlo数值模拟方法研究了辉光等离子体辅助化学气相沉积法 (GPCVD)低温合成金刚石的过程中 ,电子在H2 /CH4 混合气体中的运动 .本文在数值模拟中 ,采用非匀强电场 ,并考虑了电子的雪崩过程 ,实现了对须跟踪的粒子数不断增长的系统的MonteCarlo模拟 。

Monte Carlo simulation is adopted to study the electron motion in the mixture of H 2 and CH 4 during diamond synthesis via Glow Plasma assisted Chemical Vapor Deposition (GPCVD). The non-uniform electric field is used and the avalanche of electrons is taken into account in this simulation. The Monte Carlo technique for simulating the evolution of an assembly of particles increasing in number is successfully applied in the obtaining of the energy and angle distribution of the electrons.