聚酰亚胺型耐热感光高分子的热分解动力学

A Study on the Thermal Decomposition Kinetics of Polyimide-type Photoresist Polymer

本文用热重分析法研究了聚酰亚胺型耐热感光高分子的热分解动力学.分别采用积分法、改进的积分法和微商法对实验数据进行了处理.后者只需一张热谱图,选用三次样条函数对热失重数据进行插值和微分,通过二元回归给出了热分解活化能、反应级数和频率因子,因此这是一种非常简便的方法.研究结果表明,笔者所合成的感光高分子具有优良的耐热性.

In this paper the thermal decomposition Kinetics of Polylmide-type photoresist polymer was studied by means of thermalgravimetry.Three methods have been used seperately to deal with the experimental data i.e. integration,improved intergration and differentiation method,The last one requries only one thermogram,choosing the cubic spline function to interpolate and differentiate the thermal zero gravity data,then by binary regression,we got the thermal decompsition activation energy,the reaction order as well as the frequency factor of the thermal decomposition. Therefore it is a very simple and convenient method.The investigative results showed that the photoresist polymer made by authors has excellent heat resistance.