8相位256×256衍射微透镜的设计与制作

Design and Fabrication of 256×256 Diffractive Microlens Array with 8 Phases

介绍了衍射微透镜阵列的设计原理与制作工艺方法，在此基础上研制出适用于 ３～５ μｍ波长２５６×２５６ ＰｔＳｉ红外焦平面的 ８相位 ２５６×２５６硅衍射微透镜阵列，阵列中微透镜的孔径为 ５０μｍ，透镜 Ｆ数为 ｆ／２．５，微透镜阵列的中心距为 ５０μｍ。实测衍射效率大于 ８０％，能在红外波前传感器中较好应用。

The design and fabrication method for the diffractive microlens array have been studied, based on the research achievement, 256×256 diffractive microlens array have been manufactured for 3-5 μm wavelenth 256×256 infrared focal plane array (IFPA). The lens F number and array pitch are f/2.5 and 50 μm. The lens diameter is 50 um. It can be successfully used in infrared wavefront sensor with the diffractive efficiency larger than 80%.