MEMS光开关及主要工艺技术的研究

Research on MEMS optical switches and its key process technololy

光开关是实现全光网络的核心技术之一 ,目前光开关采用的主要技术方案有MEMS、铁电液晶、气泡、热光、全息、声光、热毛细管等 ,其中MEMS光开关因具有体积小、集成度高、能大规模生产等优点成为光开关研究的关键之一。本文对MEMS光开关的类型、特点及研究现状进行介绍 ,并重点对MEMS光开关涉及的工艺技术进行研究 ,认为工艺问题是MEMS光开关研究成败的关键。

Optical switch is one of the core technologies of AON(All-Optical Network).Now there are several kinds of schemes to make optical switches,such as MEMS(Micro Electro Mechanical Systems),ferroelectric liquid crystal,bubble,Thermo-Optics,Holograms,Acousto-Optics,Thermo-capillarity and so on.Among them MEMS is an important technology because of its compactness,high integration level and can be manufacturing in large scale.In this paper,the type,characteristics and research of MEMS optical switch are introduced and the process technologies are discussed.The Process technologies are considered as the key of success.