摘要
为了找到制备具有最佳光电导性能的CuPc/ZnS多层复合薄膜的工艺参数 ,研究了CuPc/ZnS多层复合膜的层数系列、CuPc膜层的厚度系列、ZnS膜层的厚度系列和基板温度系列的光电导性能和结构。利用表面电位衰减、紫外 可见光谱和X射线衍射分析了复合薄膜的光电导性能和结构及其关系 ,探讨了改变复合膜层数。
A new type of organic/inorganic composite multi-layers of CuPc/ZnS, which can be used as good photo-conductive materials, were grown by vacuum deposition. The multilayers were studied with X-ray diffraction, UV spectroscopy and atomic force microscopy. Influence of various parameters on photo-conductivity and structures of the film, such as the bilayer number of CuPc/ZnS, layer thickness of CuPc and ZnS, substrate temperatures as well as surface topography, were studied to optimize the film growth conditions. We found that the 6 bilayers of CuPc/ZnS film, grown at a substrate temperature of 150°C, with thickness of 0.1 μm for CuPc and ZnS layers, respectively, can have the highest photo-conductivity.
出处
《真空科学与技术》
EI
CSCD
北大核心
2002年第1期15-19,共5页
Vacuum Science and Technology
基金
国家自然科学基金 (No .69890 2 30
60 0 0 60 0 3)
浙江省自然科学基金资助项目
关键词
多层复合膜
光电导特性
CuPc/ZnS
有机/无机复合薄膜
硫化锌
结构
Atomic force microscopy
Copper
Film growth
Multilayers
Photoconductivity
Surface topography
Ultraviolet spectroscopy
Zinc sulfide
