基于立体成型法的微激励器静态性分析

Static Characteristics Analysis of Micro-actuator Based on Micro-stereolithography

介绍一种新型的微细加工方法,即微型立体成型法,以及基于这种方法制造微型电容式激励器的工序步骤。详细分析了该激励器在静电力作用下的静态特性,导出了可动极板处于稳定平衡时的条件及在此条件下的线位移范围,给出了驱动电压与可动极板位移量之间的关系曲线,用所制作的微激励器对上述推证结果进行了实验验证。

Micro-stereolithography and the fabrication process of a mi-cro-actuator manufactured by the micro -stereolithography are intro-duced.The static characteristics of the micro-actuator,which driven by electrostatic force is analyzed in detail.Stable balance condition of movable plate electrode and range of displacement in the condition are deduced.The relationship between deflection of the movable plate electrode and the electrostatic force is shown.The results,which de-duced by using the micro-actuator is validated.