TiN薄膜腐蚀过程的电化学原子力显微镜原位研究

In Situ Research of the Early Stages of Corrosion in TiN Thin Films Using the Electrochemical Atomic Force Microscopy

用离子束增强沉积 (IBED)技术在 1Cr18Ni9不锈钢上制备了TiN薄膜 ,并用电化学原子力显微镜 (ECAFM) ,从纳米级空间分辨度对其在 3%NaCl溶液中的早期腐蚀过程进行了原位研究。结果表明 ,TiN薄膜在极化电位的阴极区域发生钛氧化物膜的还原溶解 ;在低阳极极化电位下 ,发生轻微腐蚀 ,当阳极极化电位进一步提高 ,在 2 0 0～ 30 0mV出现电解抛光现象。可见 ,电化学原子力显微镜是研究早期腐蚀过程的有效研究手段 。

TiN films were deposited onto 1 Cr1 8Ni9 austenitic stainless steel using ion beam enhanced deposition (IBED) technique. In situ electrochemical atomic force microscopy (ECAFM) has been used to study the early stages of corrosion of the TiN films in 3% NaCl solution at the nanometer scale. It was shown that titanium oxide was reduced and dissolved under cathodic polarization potential and the micro - corrosion was niildly occurred under low anodic polarization potential. Electropolishing was occurred when the anodic polarization potential rising from 200 to 300 mY. The results indicated that the atomic force microscopy was a powerful instrument to investigate the early stases of corrosion; the process of micro-corrosion could be in situ studied.