微机械光调制器的制备及其在不同激励条件下的响应研究

Response Study of the Micromechanical Modulator under Different Drive Conditions

本文主要讨论了具有机械式抗反射开关 (即MARS)结构的新型微机械光调制器 .MARS结构光调制器由表面微机械工艺制备 .测量结果表明 ,微机械光调制器有一系列的固有频率 .当器件被正弦信号激励时 ,其响应信号也是正弦信号 .当器件被方波信号激励时 ,响应信号和激励频率有关 .当激励方波频率远低于器件固有频率时 ,器件响应实际上是对上下两个阶跃信号的响应 :出现明显的阻尼振荡效应 .当激励频率在固有频率附近时 ,器件实际只对方波的基频效应

A new type of micromechanical optical modulator with a MARS structure is presented, which is fabricated by the surface micromechanical process. The measurement results show that the modulator has a series of resonant frequencies. When the modulator is driven by the sinusoidal signal, the response signal is also sinusoidal. However, when the modulator is driven by the square wave signal, the response signal depends on the driving frequency. If the frequency of the driving signal is far less than the resonant frequency, the modulator is driven by the up and down step signal: there is a damp vibration phenomenon. If the driving frequency is close to the resonant frequency, only the fundamental frequency part of the square wave has an effect: the modulator response is the sinusoidal signal.