摘要
制备了具有不同应力状态的Ti/Ag双层薄膜及Ag单层膜。考察了两类薄膜的内应力状态及其对薄膜摩擦学性能的影响。试验结果表明 :薄膜的应力状态对其摩擦学性能可产生明显影响。Ti/Ag双层薄膜的应力变化及其对摩擦学性能的影响比单层膜更为复杂。
The residual inner stresses in ion plating Ti / Ag duallayer film and Ag film were evaluated by XRD and the film substrate adhesive force analyzed by scratch tester. The results showed that the residual inner stress obviously influenced the tribological performance of both Ag film and Ti/Ag duallayer film.
出处
《机械工程材料》
CAS
CSCD
北大核心
2002年第1期29-31,45,共4页
Materials For Mechanical Engineering
基金
国家自然科学基金资助项目 ( 5 980 5 0 19)
