超高真空陶瓷管内壁镀膜的方块电阻测量

Square Resistance Measurement of Inner Surface Coating of Ultra-high Vacuum Ceramic Pipes

使用一种新的感应线圈方法对超高真空陶瓷管内壁导电膜的方块电阻进行了测量 ,其优点在于 :不用直接接触膜层就能测量到管内深处不易放置探针的地方的方块电阻 ;可进行在线测量而不破坏管内真空。解决了应用中的难题 。

A new method has been developed to measure the square resistance of the inner surface coating of the ultra high vacuum ceramic pipes.The advantages include high measurement efficiency and in situ measurement in non contact mode.It is capable of measuring the square resistance in areas deep inside the pipe in vacuum no other probe can reach.This new method is of much technological interest in some practical applications.