氮化铝陶瓷表面钛金属化的研究

A Study of AlN Ceramic Surface Titanium Metallization by Molten Salt Disproportional Reactions

利用熔盐热歧化反应在氮化铝陶瓷表面上成功地进行了钛金属化,成功地在氮化铝陶瓷表面上制备了钛金属化膜。还研究了温度、反应物浓度、反应时间对钛金属化膜厚度的影响。研究了金属膜的组成及界面反应机理和界面层的显微结构。研究发现,在热歧化反应沉积钛金属膜的过程中,沉积到AlN陶瓷表面的钛金属与AlN发生反应生成TiN_(0.3)、TiN和Ti_9Al_(23)。

Titanium metallized film on AlN ceramic surface was produced by molten salt disproportional reactions.The influences of reaction time,reaction temperature and the initial concentration of potassium fluoroti-tanate(K2TiF6 %) on the thickness of the metallic film on AlN ceramic surface were determined.The composition of the coating layers,the microstructure and interface between the film and ceramic substrate were characterized by XRD and SEM.The reaction mechanism between AlN and Ti deposited by disproportional reaction was also studied.It was found that the thickness of the coatings increased with the reaction temperature and the reaction time,and there was a good linear relation between the layer thickness and the reaction time.The deposition rate increased linearly with the initial concentration of potassium fluorotitanate in salt (K2TiF6%).XRD analysis showed that the metallic film was consisting of TiN0.3,Ti9Al23 and TiAl3.