摘要
SMIF/微环境是应IC产品集成度不断提高而发展起来的新技术。由于其工艺复杂,造价昂贵,所以在设计时有必要对其运行性能加以预测。本文运用CFD技术预测其内部气流流场,为SMIF装置的设计制造及运行提供理论依据。
SMIF/minienvironment is offered as an alternative to conventional cleanroom facilities for satisfying the continuous increase in the integration level of IC product.It's necessary to predict its performance in the design phase. This paper uses CFD method to forecast the airflow field in the minienverionment in order to provide a theoretical basis for designing,manufacturing and operating of SMIF/minienvironment.
出处
《建筑热能通风空调》
2002年第1期2-6,共5页
Building Energy & Environment
基金
我国自行开发研制SMIF/微环境的九五国家重点科技攻关项目
关键词
SMIF/微环境
气流
数值模拟
SMIF/minienverionment, airflow, numerical simulation
