振动轮式微机械陀螺频率配置和气压选择

Arrangement of Vibration Frequency and Selection of Operation Pressure for Micromachined Vibrating Wheel Gyro

推导了振动轮式微机械陀螺的输出信号与输入角速度的幅频、相频关系 ,讨论了在不同的频率配置和品质因数下陀螺的灵敏度、带宽和零位稳定性。陀螺振动频率应设计在 2 k Hz左右 ,检测轴自然频率比驱动轴高一个陀螺频带宽度。根据实测陀螺振动品质因数与气压的关系曲线 ,振动轮式微机械陀螺合适的工作气压是 1 0 0 Pa～ 1 0 0 0

The amplitudefrequency and phasefrequency relationships between the input angular rate and the output of a micromachined vibrating wheel gyro are derived,the sensitivity bandwidth and zero stability of the gyro in different frequencies arrangement and quality factors are discussed.The natural frequency of the gyro should be about 2 kHz,and the natural frequency of senseaxis should be one bandwidth higher than that of driveaxis. According to the experimental relationship between the Qfactor and the pressure,the appropriate operation pressure of the gyro is about 100 Pa to 1 000 Pa.