摘要
微系统是近十多年迅速发展的新兴交叉学科领域．微系统动力学是微系统科学中的重要组成部分．微系统一般具有固有的非线性．本文从建模、分析、设计、控制、实验、测试、材料及制造等几方面归纳了微系统动力学中的若干非线性问题，并对今后的研究方向进行了展望．
Microsystems, or microelectromechanical systems (MEMS), are a new and fast devel- oping, interdisciplinary field. Microsystem dynamics is an important part of microsystem science. Microsystems, generally, are of inherent nonlinearity. In this paper, some nonlinear problems in microsystem dynamics are summed up from the angles of modelling, analysis, design, control, experiment, measurement, material, microfabrication, and so on, and the prospects of research directions in the future are given.
出处
《力学进展》
EI
CSCD
北大核心
2002年第1期17-25,共9页
Advances in Mechanics
