Mo离子注入对金刚石涂层附着性能的影响

Effect of Mo ion-implantation on the adhesion of diamond coatings

采用Mo离子注入工艺对YG6硬质合金基体表面进行处理 ,用微波等离子体CVD(MPCVD)法沉积金刚石涂层 ,研究了Mo离子注入工艺对金刚石涂层附着性能的影响 .结果表明 ,Mo离子注入后 ,硬质合金基体表面的化学成分发生了明显变化 ;采用适当剂量的Mo离子注入基体 ,可使CVD金刚石涂层的附着性能显著提高 .

Diamond coatings were deposited on the cobalt-cemented tungsten carbide(YG6) substrates, which have been implanted with Mo ions, by microwave plasma CVD(MPCVD) method.The effect of ion-implantation on the adhesion of diamond coatings was studied. The results showed that the chemical compositions of cemented carbide substrate surfaces change obviously after Mo ion-implantation; and the adhesion strength between the CVD diamond coatings and the substrates implanted with Mo ions in proper concentration is improved remarkably.